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C00355 - SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality StdPbc-0825 odorless and tasteless

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4.4

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odorless and tasteless

Direction for improvement for equipment manufacturers will become clear

The guide will provide criteria and common baselines of the middle-end process for related upstream and downstream manufacturers in fabricating 3DS-IC products

The model contained in this Specification documents features of the equipment structure considered necessary for more than one (current or future) Equipment Communication Standards

SEMI E54 — Sensor/Actuator Network Standard

C00355 - SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality StdPbc-0825 odorless and tastelessThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published February 2000; previously published October 2011. The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry. This

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